IR/Color Composite Image Sensor with VIPS(Vertically Integrated Photodiode Structure)
نویسندگان
چکیده
Abstract The CMOS image sensor having VIPS(Vertically Integrated Photodiode Structure) was fabricated for the first time. By adding the high energy(~3MeV) ion implantation to the conventional CIS(CMOS Image Sensor) process, it was verified that the deep photo diode was successfully formed under the normal photodiode on a pixel. And it was observed that this image sensor can detect the visual image and near IR(Infra Red) image at the same time and distinguish the two images.
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